METHOD FOR ESTIMATING ETCHING QUANTITY BY NEURAL NETWORK,申请号JP19970113983-传众专利搜索

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发明名称	METHOD FOR ESTIMATING ETCHING QUANTITY BY NEURAL NETWORK
摘要
申请公布号	JPH10306387(A)	申请公布日期	1998.11.17
申请号	JP19970113983	申请日期	1997.05.01
申请人	DAINIPPON PRINTING CO LTD	发明人	SATO AKIRA;IINUMA TERUAKI;YAMAJI MASATAKA;WATANABE SATOSHI;YOTSUMOTO YUICHIRO;KANAI YUJI;SUZUKI HIROSHI
分类号	C23F1/00;G06F15/18;G06F17/50;G06N3/00;H01L23/50;(IPC1-7):C23F1/00	主分类号	C23F1/00
代理机构		代理人
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