发明名称 Integrated circuit having improved polysilicon resistor structures
摘要 A metal oxide semiconductor static random access memory (SRAM) includes NMOS transistors and resistor structures implemented without multiple polysilicon layers. According to a first embodiment, the SRAM cell comprises a plurality of appropriately interconnected NMOS transistors having transistor gates formed of a polysilicon layer and resistors formed of the same polysilicon layer. In accordance with a second embodiment, the SRAM cell comprises a plurality of appropriately interconnected NMOS transistors, a dielectric layer overlying the NMOS transistors, and polysilicon resistors passing through the dielectric layer to connect the NMOS transistors to a first metal layer. The dielectric layer, deposited on the NMOS transistors, defines holes exposing drain regions in the NMOS transistors. A polysilicon layer is deposited on the dielectric layer to fill the holes, and the excess polysilicon is removed.
申请公布号 US5838044(A) 申请公布日期 1998.11.17
申请号 US19950571056 申请日期 1995.12.12
申请人 ADVANCED MICRO DEVICES 发明人 CHANG, KUANG-YEH;LIU, YOWJUANG W.
分类号 H01L21/8244;H01L27/11;(IPC1-7):H01L29/00 主分类号 H01L21/8244
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