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经营范围
发明名称
SPIN TREATING DEVICE
摘要
申请公布号
JPH10303169(A)
申请公布日期
1998.11.13
申请号
JP19970112533
申请日期
1997.04.30
申请人
SHIBAURA ENG WORKS CO LTD
发明人
ISO AKINORI;YAMAZAKI TAKAHIRO;OYAMA IWAO
分类号
B08B3/02;B08B3/12;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/02
代理机构
代理人
主权项
地址
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