发明名称 TRANSFER MACHINE
摘要 PROBLEM TO BE SOLVED: To prevent the occurrence of a time lag between the lift operations of left- and right-side lift driving sections by making the number and numbers of teeth of the lift rotation transmission gears of the left-side lift driving section equal to those of the right-side lift driving section. SOLUTION: When a work 21 placed on a loading conveyor 19 is transferred to a preliminary cleaning both 22 by means of an interlocked arm 13 for delivering work, a left-side transfer lift driving section 1 transmits the rotation of a lift driving motor 2 to an lift driving screw 3 and a nut 4 through transmission gears A and B. In addition, a right-side transfer lift driving section 20 transmits the rotation of a spline shaft 6 directly coupled with the motor 2 to a feed screw 3 and a nut 4 through transmission gears C and D. Therefore, the left- and right-side transfer lift driving sections 1 and 20 can be moved upward and downward by the same distance at the same speed.
申请公布号 JPH10303160(A) 申请公布日期 1998.11.13
申请号 JP19970107048 申请日期 1997.04.24
申请人 HITACHI LTD 发明人 HIROKI MINORU;ISHIDA YASUHIKO
分类号 H01L21/677;H01L21/304;H01L21/68;(IPC1-7):H01L21/304 主分类号 H01L21/677
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