| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL element with low luminescence starting potential and stable luminescent property by dry-etching an transparent electrode under reduced pressure and continuously giving dry cleaning treatment under reduced pressure without exposing it to the air to form an anode plate and forming a cathode on an organic layer containing an organic luminescent layer formed on the anode plate. SOLUTION: An organic EL element is formed by laminating, on an anode 1, a positive hole filling and transportation layer 2, an organic luminescent layer 3, a cathode 4 and a sealing film in sequence. The anode 1 and the cathode 4 are connected together via a lead 9 voltage is applied thereon for the organic luminescent layer 3 to emit light. As patterning is performed with dry etching under reduced pressure the mixture of impurities is prevented, as dry cleaning is continuously performed, the anode 1 with the clean surface is obtained, and as the anode 1 is oxidized on its surface by exciting oxygen atoms, ionizing potential is increased and the filing of the positive holes is improved. In this way, the organic EL element with a high luminance and a long life is obtained without causing black-spotted un luminescent areas on a luminescent plane. |
