| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive acceleration sensor of high sensitivity, high frequency response and low drift and its manufacture. SOLUTION: The capacitive acceleration sensor has a flexible substrate 1 comprising a weight part 1a and a supporting part 1c supporting the weight part 1a via a flexible part 1b, an upper substrate 2a and a lower substrate 2b bonded to the supporting part 1c respectively to cover above and below the weight part 1a. Electrodes 3 are formed at faces of the upper substrate 2a and lower substrate 2b confronting the weight part 1a. A thickness of the weight part 1a is smaller than a thickness of the supporting part 1c. When the upper and lower substrates 2a and 2b are bonded to the supporting part 1c, a gap is formed between the upper, lower substrate 2a, 2b and the weight part 1a. Each electrode 3 is arranged to partly overlap with a terminal part of the weight part 1a. |
