| 摘要 |
FIELD: application of multiple-layer covers from metals or their compositions, such as oxides, nitrides, carbides, and so on. SUBSTANCE: device is designed as separate vacuum chambers: article feeding chamber, article heating chamber, ion- plasma purification chamber, deposition chamber and receiving chamber for coiling fiber. Said chambers are arranged in vertical column through connection flanges. Required level of vacuum pumping is achieved by vacuum pumps. Difference in working pressures in chambers is kept by multiple-stage differential chambers which are mounted between article heating chamber and ion-plasma purification chamber and between deposition chamber and receiving chamber. High-frequency discharge is used for fiber purification and deposition. EFFECT: single vacuum volume for pulling fiber from article, its purification, deposition of cover, coiling of resulted fiber, increased mechanical strength of fiber with uniform coating depth and content. 7 dwga
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