发明名称 ARSENIC AND/OR ANTIMONY-CONTAINING POLYCRYSTAL SILICON SOLIDIFYING WITH ORIENTATION, ITS PRODUCTION USE AND SOLAR CELL CONTAINING THE SAME AND ITS PRODUCTION
摘要 <p>PROBLEM TO BE SOLVED: To inexpensively obtain polycrystalline silicon that is solidified with directionality and particularly can be used in solar cells with high efficiency by allowing polycrystalline silicone to contain arsenic and antimony in specific ranges. SOLUTION: Single crystalline or polycrystalline silicon containing arsenic and antimony in the ranges of 10<13> -10<17> atoms/cm<3> , respectively, is molten and crystallized with directionality to give the objective polycrystalline silicon. This polycrystalline silicon has preferably a resistance in the range of 100-10,000 mΩcm and the diffusion distance of the minor carriers LD of >=10μ. In an embodiment, this silicon includes arsenic and antimony in the above-stated ranges and contains the main dopants of at least one of the main group 3 in the periodic group (as B, Al) or of the main group 5 (P other than As and Sb) in the concentration of 10<15> -10<19> atoms/cm<3> .</p>
申请公布号 JPH10297993(A) 申请公布日期 1998.11.10
申请号 JP19980123918 申请日期 1998.04.20
申请人 BAYER AG 发明人 WODITSCH PETER;HAESLER CHRISTIAN;KRUMBE WOLFGANG;LANGE HORST;WEBER KLAUS
分类号 C30B29/06;C30B11/00;H01L31/0288;H01L31/04;H01L31/068;H01L31/18 主分类号 C30B29/06
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