摘要 |
<p>PROBLEM TO BE SOLVED: To inexpensively obtain polycrystalline silicon that is solidified with directionality and particularly can be used in solar cells with high efficiency by allowing polycrystalline silicone to contain arsenic and antimony in specific ranges. SOLUTION: Single crystalline or polycrystalline silicon containing arsenic and antimony in the ranges of 10<13> -10<17> atoms/cm<3> , respectively, is molten and crystallized with directionality to give the objective polycrystalline silicon. This polycrystalline silicon has preferably a resistance in the range of 100-10,000 mΩcm and the diffusion distance of the minor carriers LD of >=10μ. In an embodiment, this silicon includes arsenic and antimony in the above-stated ranges and contains the main dopants of at least one of the main group 3 in the periodic group (as B, Al) or of the main group 5 (P other than As and Sb) in the concentration of 10<15> -10<19> atoms/cm<3> .</p> |