发明名称 Method for the optimum utilization of base material in the manufacture of optoelectronic components with variable-period grating
摘要 Disclosed is a method for the optimum utilization of disk-shaped base material in the manufacture of optoelectronic components with variable-period grating. The method helps avoid material losses by arranging optoelectronic components on a disk-shaped base material in an optimum manner and is based on obtaining variants of nominally identical individual component patterns by mathematical rotation and mirroring, forming a unit cell through shifting of the individual component pattern variants, and reproducing the unit cell in the x and y directions until the active surface of the mask or the entire surface of the disk-shaped base material is tightly covered. The method may be used for the manufacture of photonic components based on DFB, DBR, or sampled grating structures.
申请公布号 US5834158(A) 申请公布日期 1998.11.10
申请号 US19960655502 申请日期 1996.05.30
申请人 DEUTSCHE TELEKOM AG 发明人 HILLMER, HARTMUT
分类号 G02B6/12;G02B6/124;G03F7/20;H01S5/02;H01S5/10;H01S5/12;H01S5/125;(IPC1-7):G03C5/00;G02B6/34 主分类号 G02B6/12
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