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发明名称
摘要
申请公布号
JP2821977(B2)
申请公布日期
1998.11.05
申请号
JP19930167065
申请日期
1993.07.06
申请人
发明人
分类号
H01L21/56;B29C31/04;B29C45/02;B29C45/18;(IPC1-7):H01L21/56
主分类号
H01L21/56
代理机构
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