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发明名称
Verfahren und Vorrichtung zur Einstellung des Abstandes zwischen einem Werkstück und einer Maske
摘要
申请公布号
DE69413611(D1)
申请公布日期
1998.11.05
申请号
DE19946013611
申请日期
1994.07.07
申请人
USHIODENKI K.K., TOKIO/TOKYO, JP
发明人
TANAKA, YONETA, YOKOHAMA-SHI, KANAGAWA-KEN, JP;OKADA, SHOICHI, KAWASAKI-SHI, KANAGAWA-KEN, JP
分类号
G03F7/20;G03F9/02;H01L21/68;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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