| 摘要 |
<p>A device, and the related method of fabricating such a device, for generating surface acoustic waves (SAW) based on interdigitation of electrodes. The device has a line width and spacing of quarter wavelengths on the order of 100 nanometers or less to enable operation at frequencies above 10GHz. In operation, the device can be modified to effect very narrow bandwidth, high frequency rf filters, as well as modulators, convolvers and other devices used for signal processing. Because the electrode structure of the device are both narrow in dimension, as well as uniform in size, the opportunity for propagation of other than the desired frequency is minimized. To this end, because of the uniformity of line-width and line spacing, very accurate quarter wavelength devices can be fabricated. This reduces the possibility of a device supporting other wavelengths in the surface acoustic wave medium, thereby narrowing the bandwidth of the devices. The narrow bandwidth, and thereby narrow frequency response, of the device enable high speed operation. To this end, it is clear that devices based on accurate wavelength dependent structures, for example quarter wavelength SAW filters, can be fabricated.</p> |
