| 发明名称 |
Vacuum chuck |
| 摘要 |
<p>A vacuum-attraction holding device incudes a holding base having an attracting surface, for holding a substrate thereon; a suction passageway formed in the base, for supplying a vacuum to the holding base to attract the substrate to the attracting surface; and a pressure sensor provided in the base and being communicated with the suction passageway. <IMAGE></p> |
| 申请公布号 |
EP0463853(B1) |
申请公布日期 |
1998.11.04 |
| 申请号 |
EP19910305730 |
申请日期 |
1991.06.25 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
MORI, TETSUZO;MARUMO, MITSUJI;IWAMOTO, KAZUNORI;CHIBA, YUJI;KASUMI, KAZUYUKI |
| 分类号 |
G03F7/20;H01L21/683;(IPC1-7):H01L21/00 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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