| 摘要 |
PROBLEM TO BE SOLVED: To prevent an abnormal increase in pressure in a disinfecting booth even if an oxygen supply control solenoid value runs into trouble. SOLUTION: Whether or not the detecting zone concentration becomes an upper limit value or more is discriminated (41), and when discriminated that a detecting value of an ozone flow rate sensor is not zero (46) when it is discriminated as the upper limit value or more, a first solenoid valve is discriminated as trouble, and a second solenoid valve is closed, and supply of oxygen is stopped (48). As a result, even if the first solenoid valve runs into open trouble, an abnormal increase in pressure in a disinfecting booth can be prevented. |
