| 摘要 |
<p>PROBLEM TO BE SOLVED: To correct the dispersion of the distribution of irradiating energy densities of an object subjected to linear laser beam machining by means of an optical system. SOLUTION: By using an optical system provided with a cylindrical lens group 202, in which each lens has a width W, playing a role of dividing a light beam into N(n-1) beams in the longitudinal direction, a parallelogram-shaped cylindrical lens group 501 having about an angle X defined by|tanX|=W/(d/(n-1)) and playing a role of dividing a light beam into (2n+1) beams in the lateral direction, a parallelogram-shaped cylindrical lens 502 having about an angle X defined by|tanX|=W/d/(n-1)) and playing a role of recoupling the divided beams in the lateral direction and a cylindrical lens 204 playing a role of recoupling the divided beams in the longitudinal direction, the energy distribution in the laser beam is uniformized. The (d) is the peak interval of an interference fringe formed on the irradiating surface by a beam passing through one of the lenses constituting a cylindrical lens group for dividing a light beam in the longitudinal direction.</p> |
