Synthetische Diamantschicht mit verringerter Biegung und Verfahren zu ihrer Herstellung

摘要

The invention relates to synthetic diamond films in which the undesirable bowing is reduced by reducing the severe non-uniform intrinsic stress distribution across the diamond thickness. According to one aspect of the invention, the defect density is reduced in the initial deposition zone of the diamond film. Application to, in particular, relatively large area diamond films.