Verfahren und Vorrichtung zur Reinigung von Werkstücken

摘要

The invention relates to a device and method for cleaning and drying work pieces in a treatment vessel (1) in which it is possible to produce a negative pressure. During the cleaning process, a liquid bath (50) is formed in the treatment vessel (1), said liquid bath surrounding the work pieces at least partially, and cleaning fluid and optionally a gaseous medium are introduced into the treatment vessel (1) under excess pressure via a spray unit (8a, 8b). The work piece support moves up and down or rotates so that the work pieces are subjected alternately to different cleaning processes in the liquid bath (50) and a gas chamber (52) situated above said liquid bath.