| 摘要 |
PROBLEM TO BE SOLVED: To enable detection of an angular velocity in a highly accurate manner without receiving any effect of noise spread along with a polarizing electrode, in this angular velocity sensor equipped with a tuning fork-form vibrator where the polarizing electrode unnecessary for detecting this angular velocity is made up. SOLUTION: In this sensor, those of driving electrodes 12a, 12b, monitor electrodes 14a, 14b and polarizing electrodes 18a, 18b are formed on an X1 surface of a tuning fork-form vibrator 2 consisting of a piezoelectric body, making up each of detecting electrodes 22a and 22b on both Y1 and Y2 surfaces, and likewise a temporary GND electrode 24 or a common electrode to each electrode is formed on an X2 surface. In this case, the polarizing electrodes 18a, and 18b are grounded to the reference electric potential via the temporary GND electrodes 16a, 16b formed on the X1 surface and a wire connected to these electrodes. In consequence, S/N ratio in a detecting signal is improvable, while an offset temperature drift of the detection signal to be produced by a pyroelectric effect at the polarizing electrodes 18a and 18b is abated, and further, reliability and durability in this angular velocity sensor are improvable. |
