ROTARY POSITIONING APPARATUS FOR SUBSTRATE,申请号JP19970105374-传众专利搜索

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发明名称	ROTARY POSITIONING APPARATUS FOR SUBSTRATE
摘要
申请公布号	JPH10284409(A)	申请公布日期	1998.10.23
申请号	JP19970105374	申请日期	1997.04.09
申请人	NIKON CORP	发明人	MASUYUKI TAKASHI
分类号	G03F7/20;G03F9/00;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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