| 摘要 |
PROBLEM TO BE SOLVED: To enable controlling to minimize the fluctuation in room temperature, and to prevent the formation of a magnetic field with small occupying space. SOLUTION: Cold water circulates from a heat source 56 through a duct line 52, the primary side piping of a heat exchanger 50, and a duct line 54. A pump 74 is constantly driven, so that the cold water always circulates in a circulation path (B) which extends from the secondary side piping of the heat exchanger 50, through duct lines 64, 68, and 66, and returns to the heat exchanger 50, and then heat exchange is provided between the cold water supplied by the heat source 56 and the cold water circulating in the circulation path (B). A pump 88 is also constantly driven, so that the cold water always circulates in a circulation path (A) which extends from an internal piping of a cold water coil 34, through duct lines 44, 86, and 42, and returns to the cold water coil 34, and then heat exchange is provided between the cold water circulating in the circulation path (A) and the air passing through the position at which the cold water coil 34 is arranged to be supplied into a clean room. A controller 82 controls the opening of valves 90 and 78, based on the air supply temperature detected by a sensor 94, so as to control the flow rate of the cold water between the circulation paths (A) and (B). |
