发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND POWER SUPPLY WIRING METHOD FOR THE SAME
摘要 PROBLEM TO BE SOLVED: To relieve a voltage drop and guarantee the stable operation of a logic circuit by a method, wherein the number and the positions of contacts provided between 1st power supply lines and 2nd power supply lines so as to minimize the voltage drop of the circuit. SOLUTION: Reinforcing power supply lines 22 are provided on basic power supply lines 21, to form a lattice with an interlayer insulating film 23 therebetween. Further, contacts 31 are provided at respective cross points of the basic power supply lines 21 and the reinforcing power supply lines 22. The number and the positions of the contacts 31 are optimized by an optimizing method and, even if only one contact is added/removed to/from the wiring pattern of the contacts 32, a maximum voltage drop at the time of a circuit operation is degraded. With this constitution, the voltage drop can be relieved. Further, as the voltage drop is suppressed to be a minimum, the normal operation of a transistor in a logic circuit unit and the stable operation of a circuit can be guaranteed.
申请公布号 JPH10284690(A) 申请公布日期 1998.10.23
申请号 JP19970088363 申请日期 1997.04.07
申请人 TOSHIBA CORP 发明人 NOJIMA REIKO
分类号 H01L21/3205;G06F17/50;H01L21/822;H01L23/52;H01L27/04;H01L27/118;(IPC1-7):H01L27/04;H01L21/320 主分类号 H01L21/3205
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