MANUFACTURE OF SUBSTRATE HAVING COLOR FILTER, AND SUBSTRATE HAVING COLOR FILTER

摘要

PROBLEM TO BE SOLVED: To manufacture an inorganic color filter free from any step on the surface of an anode substrate. SOLUTION: A resist 2 of a glass substrate 1 is machined to the prescribed pattern by a photo-lithography method, and a groove 4 is formed through the etching. An inorganic blue filter paste B is coated on the surface of the glass substrate 1, and fired. The glass substrate 1 is polished to remove the blue filter B projected from the groove 4 through polishing. A red filter R and a green filter G are formed in a similar process. A smooth layer 5 is formed. A transparent conductive film 6 is formed by the photolithography method. A substrate of the structure in which the inorganic color filter is embedded in the groove of the substrate can be manufactured. Even when the film thickness of the color filter is increased, the film thickness of the color filter can be canceled by changing the depth of the groove to be formed in the substrate, and the substrate having a flat filter can be stably obtained.