发明名称 CERAMIC GREEN SHEET
摘要 PROBLEM TO BE SOLVED: To improve via hole forming property by forming a ceramic green sheet contg. inorg. particles and a photosensitive org. component and having a specified arithmetic average roughness according to JIS B0601 when the surface has a specified evaluated length and a specified cut-off value. SOLUTION: This ceramic green sheet consists of 70-95 wt.% inorg. powder, 25-10 wt.% photosensitive org. material and 0.01-1 wt.% UV absorber such as org. pigment and has <=1 &mu;m arithmetic average roughness according to JIS B0601 when the surface has 4 mm evaluated length and 0.8 mm cut-off value. The inorg. powder has 2-10 &mu;m 90 wt.% particle diameter and a refractive index of 1.5-1.8 and is simple ceramic powder of Al2 O3 , ZrO2 , etc., or glass- ceramic combined powder contg. >=30 wt.% glass powder contg. SiO2 , Al2 O3 , B2 O3 , etc. The photosensitive org. material has a refractive index of 1.45-1.7 and is an oligomer or polymer obtd. by polymerizing a compsn. contg. a photosensitive monomer such as styrene or a (meth)acrylate.
申请公布号 JPH10279364(A) 申请公布日期 1998.10.20
申请号 JP19970098125 申请日期 1997.04.01
申请人 TORAY IND INC 发明人 OGATA TOMOHIKO;TANAKA TAKESHI;MASAKI YOSHIKI
分类号 G03F7/027;C04B35/622;C04B35/632;H05K1/03 主分类号 G03F7/027
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