摘要 |
PROBLEM TO BE SOLVED: To improve via hole forming property by forming a ceramic green sheet contg. inorg. particles and a photosensitive org. component and having a specified arithmetic average roughness according to JIS B0601 when the surface has a specified evaluated length and a specified cut-off value. SOLUTION: This ceramic green sheet consists of 70-95 wt.% inorg. powder, 25-10 wt.% photosensitive org. material and 0.01-1 wt.% UV absorber such as org. pigment and has <=1 μm arithmetic average roughness according to JIS B0601 when the surface has 4 mm evaluated length and 0.8 mm cut-off value. The inorg. powder has 2-10 μm 90 wt.% particle diameter and a refractive index of 1.5-1.8 and is simple ceramic powder of Al2 O3 , ZrO2 , etc., or glass- ceramic combined powder contg. >=30 wt.% glass powder contg. SiO2 , Al2 O3 , B2 O3 , etc. The photosensitive org. material has a refractive index of 1.45-1.7 and is an oligomer or polymer obtd. by polymerizing a compsn. contg. a photosensitive monomer such as styrene or a (meth)acrylate. |