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发明名称
PRODUCTION OF QUARTZ GLASS LENS FOR LITHOGRAPHY
摘要
申请公布号
JPH10279321(A)
申请公布日期
1998.10.20
申请号
JP19970085423
申请日期
1997.04.03
申请人
NIKON CORP
发明人
HIRAIWA HIROYUKI
分类号
G02B13/14;C03B19/14;C03B20/00;G02B1/02;(IPC1-7):C03B20/00
主分类号
G02B13/14
代理机构
代理人
主权项
地址
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