首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
MANUFACTURE OF THIN-FILM PRODUCT AND PRODUCTION LINE CONTROL SYSTEM FOR THIN-FILM PRODUCT
摘要
申请公布号
JPH10275842(A)
申请公布日期
1998.10.13
申请号
JP19970079927
申请日期
1997.03.31
申请人
HITACHI LTD
发明人
KIRINO KEIKO
分类号
C23C14/54;C23F4/00;H01L21/02;H01L21/66;(IPC1-7):H01L21/66
主分类号
C23C14/54
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Method and device for controlling the movement of a needle in a sewing machine
Hollowed socket
Riding-type mower
Steel roof truss system
Salad spin-drier
Method of manufacturing vibration and noise reduction assembly
Methods and systems for determining moisture transfer characteristics of welding materials
IMAGE FORMING DEVICE
IMAGE FORMING APPARATUS
POWER SUPPLY CONTROL METHOD FOR IMAGE FORMING DEVICE, POWER SUPPLY CONTROL SYSTEM FOR IMAGE FORMING DEVICE, POWER SUPPLY CONTROL DEVICE, IMAGE FORMING DEVICE, AND COMPUTER PROGRAM
IMAGE FORMING APPARATUS
METHOD FOR CONTROLLING IMAGE FORMING APPARATUS, IMAGE FORMING APPARATUS, PROCESS CARTRIDGE AND TONER
IMAGE FORMING DEVICE AND IMAGE FORMING PROGRAM
IMAGE FORMATION DEVICE
VEHICLE PROVIDED WITH CURTAIN AIRBAG DEVICE
MOVING IMAGE DISTRIBUTION SYSTEM
DISTRIBUTED ACCUMULATION METHOD AND DISTRIBUTED ACCUMULATION DEVICE
BROADCASTING SYSTEM
VIDEO IMAGE TRANSMISSION SYSTEM, RECORDING MANAGEMENT METHOD, AND VIDEO SERVER
VIDEO PROCESSING DEVICE AND METHOD, PROGRAM AND RECORDING MEDIUM