| 发明名称 |
Optical structure and device manufacturing method using the same |
| 摘要 |
An optical component moving device having a driving portion and guiding portion, for moving an optical component, wherein the driving portion includes fluid enclosure system being expandable and contractible and the guiding portion includes a leaf spring.
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| 申请公布号 |
US5822133(A) |
申请公布日期 |
1998.10.13 |
| 申请号 |
US19960695203 |
申请日期 |
1996.08.01 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
MIZUNO, MAKOTO;EBINUMA, RYUICHI;MINOWA, TOSHINORI |
| 分类号 |
G02B7/04;G02B3/14;G02B7/02;G02B26/08;G02B27/00;G03F7/20;H01L21/027;H01L21/68;(IPC1-7):G02B15/14 |
主分类号 |
G02B7/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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