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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH10275782(A)
申请公布日期
1998.10.13
申请号
JP19970077722
申请日期
1997.03.28
申请人
HITACHI LTD
发明人
NAKAMURA MORIO
分类号
H01L21/28;H01L21/336;H01L29/78;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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