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经营范围
发明名称
CVD DEVICE
摘要
申请公布号
JPH10273779(A)
申请公布日期
1998.10.13
申请号
JP19970078103
申请日期
1997.03.28
申请人
NIPPON SANSO KK
发明人
TSUYAMA ASAKO;SAWATO YOSHINORI
分类号
G01N21/59;C23C16/44;C23C16/448;C30B25/14;H01L21/205;H01L21/31;(IPC1-7):C23C16/44
主分类号
G01N21/59
代理机构
代理人
主权项
地址
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