| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent an electrostatic chuck from warping and peeling even if a temperature changes by fixing an electrostatic chuck consisting of a ceramics plate with an inner electrode to a base formed of a metal-ceramics composite material. SOLUTION: A base 5 is constituted by using an aluminum-silicon carbide composite material, an aluminum-oxide aluminum composite material and an aluminum-aluminum nitride composite material, etc., and an electrostatic chuck 2 forming a ceramics plate 3 with an inner electrode 4 is fixed to the base 5 by an adhesive layer 6 by using alumina-base alumina ceramics, aluminum nitride, calcium titanate, silicon carbide, etc. Thereby, it is possible to reduce a difference between thermal expansion coefficient of the electrostatic chuck 2 and thermal expansion coefficient of the base 5 and to prevent the electrostatic chuck 2 from warping and peeling.</p> |
