| 摘要 |
PROBLEM TO BE SOLVED: To obtain a black matrix that satisfies various characteristics such as light performance, low reflectivity, and high resolution, and is superior in environmental protection, by varying developer concentration from high to low, and performing development. SOLUTION: A transparent substrate 1 is coated with a photosensitive resin, which previously contains a black material such as carbon black and prebaked to form a resin layer 2. Then, the photosensitive resin layer 2 is patterned and exposed through a photomask 3. Then a developing process is carried out. An initial stage, which uses a developer of high concentration is performed first. Consequently, the development reaction is accelerated and rough patterning is completed in a short time to suppress the elution of an unnecessary part. Then, a low-concentration developer which is small in the elution of the unnecessary part is used and a fine part such as an edge part which is hardly etched with the high-concentration developer is patterned. The shift from the high- concentration developer to the low-concentration developer is made preferably by lowering the density gradually without interrupting the spouting of the developer. |
