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发明名称
METHOD AND DEVICE FOR INSPECTING FOREIGN MATERIAL, AND INFORMATION PROCESSING DEVICE
摘要
申请公布号
JPH10267862(A)
申请公布日期
1998.10.09
申请号
JP19970075504
申请日期
1997.03.27
申请人
NIKON CORP
发明人
OBARA HIROYUKI
分类号
G01N21/88;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01N21/88
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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