发明名称 THIN-FILM TRANSISTOR AND LIQUID CRYSTAL DISPLAY AND CMOS CIRCUIT USING THIN-FILM TRANSISTOR THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a TFT(a thin-film transistor), in which electrical characteristics can be improved largely and efficiently as compared with the TFT having self-alignment structure by adopting optimum offset gate structure or LDD structure, and a liquid crystal display panel using the TFT. SOLUTION: The offset length Los (μm) of an offset region 7 and the film thickness tox (μm) of a gate insulating film 2 are constituted so as to satisfy formula 4.2tox-0.05<=Los<=-8.3tox+2.5 (where 0.06<=tox) in the TFT having offset gate structure. Accordingly, the wasteful reduction of an on current at the time of a change into an offset gate is prevented.
申请公布号 JPH10270700(A) 申请公布日期 1998.10.09
申请号 JP19970074222 申请日期 1997.03.26
申请人 SEIKO EPSON CORP 发明人 ITO TOMOYUKI
分类号 G02F1/133;H01L21/336;H01L29/786;(IPC1-7):H01L29/786 主分类号 G02F1/133
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