| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanner using a piezoelectric element capable of performing calibration for correcting the difference between individual piezoelectric elements. SOLUTION: A scanner has a tube-type piezoelectric scanner 3 for scanning a sample 2 in the x (left and right directions of the figure) and y (directions vertical to the Fig.) directions, a scanner controller 4 for driving the tube-type piezoelectric scanner 3, a host CPU 5 for controlling the scanner controller 4, and a displacement gauge 6 for measuring the displacement of the tube-type piezoelectric scanner 3. The host CPU 5 has a memory 5a inside, and a reference calibration curve is stored in this. The reference calibration curve is a scanner voltage curve to a scanning range led out from a displacement characteristic to the scanning voltage of a piezoelectric element, and is referred as a reference on the occasion of correcting individual tubular piezoelectric scanners. |
