| 摘要 |
PROBLEM TO BE SOLVED: To facilitate a fusing conductor and to improve reliability by arranging the conductor for the projection part of an insulating layer called as a pedestal formed in such a way that the upper part of the conductor in a mutual connection level becomes thin. SOLUTION: An insulating layer 11 is formed on a substrate 10. A first conductive level is deposited out the insulating layer 11, is patterned and a conductor 12 is formed. An intermediate insulating layer 13 is deposited so that it covers the conductor 12. A second conductive level is deposited, is patterned and a conductor 14 is formed. The surface part of the insulating layer 13, which is not protected by the conductor 14 or an etching mask 15, is removed by etching back. An initial surface 17 of the insulating layer 13 is removed until a surface 16 is exposed by etching. Thus, the conductor 14 is positioned on a pedestal 18 higher than the surface 16 of the insulating layer 13 adjacent on the conductor 14. Consequently, the fusing of the conductor 14 becomes easy and the reliability of conductor fusing can be improved. |
