发明名称 MICROTIP VACUUM FIELD EMITTER STRUCTURES, ARRAYS, AND DEVICES, AND METHODS OF FABRICATION
摘要 <p>Diamond microtip field emitters (25) are fabricated for use in diode and triode vacuum microelectronic devices, sensors and displays. Ultra-sharp emitter tips are formed in a fabrication process in which diamond is deposited into mold cavities in a two step deposition sequence. During deposition of the diamond, the graphite content is carefully controlled to enhance emission performance. The tips or the emitters (25) may be treated by post fabrication processes, such as sharpening or doping with gold.</p>
申请公布号 WO1998044529(A1) 申请公布日期 1998.10.08
申请号 US1997012760 申请日期 1997.06.25
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