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发明名称
Planarisierungsverfahren von einer integrierten Schaltung
摘要
申请公布号
DE69318880(T2)
申请公布日期
1998.10.08
申请号
DE19936018880T
申请日期
1993.03.22
申请人
SGS-THOMSON MICROELECTRONICS, INC., CARROLLTON, TEX., US
发明人
LIN, YIH-SHUNG, DENTON COUNTY, TEXAS 75010, US;HUANG, KUEI-WU, IRVING, DALLAS COUNTY, TEXAS 75063, US;LU, LUN-TSENG, DALLAS COUNTY, TEXAS 75051, US
分类号
H01L21/28;H01L21/302;H01L21/3065;H01L21/3205;H01L21/768;H01L23/522;(IPC1-7):H01L21/768;H01L21/310
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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