发明名称 |
Integrated magnetic levitation and rotation system |
摘要 |
A rotary motor and a rotary magnetic bearing are integrated in a compact assembly that is contact-less. A stator assembly surrounds a ferromagnetic rotor with an annular air gap which can accommodate a cylindrical wall, e.g. of a chamber for semiconductor wafer processing. The stator assembly has a permanent magnet or magnets sandwiched between vertically spaced magnetic stator plates with plural pole segments. The rotor is preferably a ring of a magnetic stainless steel with complementary pole teeth. The stator assembly (i) levitates and passively centers the rotor along a vertical axis and against tilt about either horizontal axis, (ii) provides a radial position bias for the rotor, and (iii) establishes a motor flux field at the rotor poles. Polyphase coils wound on the stator plates produce a rotating flux field that drives the rotor as a synchronous homopolar motor. A rotor without pole teeth allows operation with an asynchronous inductive drive. A controller energizes control coils wound on each stator pole segment in response to a sensed physical position of the rotor. The control coils provide active radial position control and can actively damp tip and tilt oscillations that may overcome the passive centering.
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申请公布号 |
US5818137(A) |
申请公布日期 |
1998.10.06 |
申请号 |
US19950548692 |
申请日期 |
1995.10.26 |
申请人 |
SATCON TECHNOLOGY, INC. |
发明人 |
NICHOLS, STEPHEN B.;JAGANNATHAN, SHANKAR;LEARY, KEVIN;EISENHAURE, DAVID;STANTON, WILLIAM;HOCKNEY, RICHARD;DOWNER, JAMES;GONDHALEKAR, VIJAY |
分类号 |
H02K17/08;F16C39/06;H01L21/687;H02K7/09;H02K17/12;H02K17/30;H02K19/10;H02K21/38;(IPC1-7):H02K7/09 |
主分类号 |
H02K17/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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