| 摘要 |
A method and apparatus which predicts an optimal period over which a dechucking voltage is applied to an electrostatic chuck to achieve dechucking of a workpiece therefrom. Specifically, the method is implemented as a software program that is executed by a conventional computer. The method applies an optimal dechucking voltage for an optimal dechucking period to dechuck the workpiece. To avoid charge accumulation on the electrostatic chuck when processing a succession of workpieces, the chucking and dechucking voltages reverse polarity after each workpiece is dechucked.
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