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发明名称
TRAPPING DEVICE
摘要
申请公布号
JPH10266957(A)
申请公布日期
1998.10.06
申请号
JP19970088749
申请日期
1997.03.24
申请人
EBARA CORP
发明人
NOMURA NORIHIKO;SUGIURA TETSUO;NOMICHI SHINJI
分类号
F04B37/16;H01L21/02;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):F04B37/16
主分类号
F04B37/16
代理机构
代理人
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地址
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