| 摘要 |
A semiconductor accelerometer is formed with a sensor plate that remains substantially planar when acceleration forces are applied. The sensor plate is supported by support beams that are attached to the sensor plate at constraint points. A portion of the mass of the sensor element is cantilevered outward past the constraint points. During the application of acceleration forces, the cantilevered mass creates a counterbalancing moment that maintains the sensor plate in a substantially planar state.
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