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发明名称
PATTERN INSPECTING DEVICE
摘要
申请公布号
JPH10260021(A)
申请公布日期
1998.09.29
申请号
JP19970065053
申请日期
1997.03.18
申请人
TOSHIBA CORP
发明人
YAMASHITA KYOJI
分类号
G01B11/00;G01B11/24;G01N21/88;G01N21/93;G01N21/956;H01L21/66;(IPC1-7):G01B11/24
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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