发明名称 |
Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
摘要 |
The thin film AMA has a substrate, an actuator, a common line, and a reflecting member. The substrate has an electrical wiring and a connecting terminal and the actuator has a supporting layer, a bottom electrode, a top electrode, and an active layer. The common line is formed on a portion of actuator and is connected to top electrode. The electrical wiring and connecting terminal may not be damaged because actuator is formed on a portion of substrate adjacent to the portion where electrical wiring and connecting terminal are formed. The voltage drop of a second signal can be minimized because common line is formed thickly on a portion of actuator, so a sufficient second signal is applied to top electrode. The flatness of reflecting member may be enhanced because reflecting member is formed on a second sacrificial layer.
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申请公布号 |
US5815305(A) |
申请公布日期 |
1998.09.29 |
申请号 |
US19970814019 |
申请日期 |
1997.03.10 |
申请人 |
DAEWOO ELECTRONICS CO., LTD. |
发明人 |
MIN, YONG-KI;CHOI, YOON-JOON |
分类号 |
G02B26/08;(IPC1-7):G02B26/00 |
主分类号 |
G02B26/08 |
代理机构 |
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主权项 |
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地址 |
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