Disk cleaning and polishing apparatus,申请号SG19970002210-传众专利搜索

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发明名称	Disk cleaning and polishing apparatus
摘要
申请公布号	SG52999(A1)	申请公布日期	1998.09.28
申请号	SG19970002210	申请日期	1997.06.26
申请人	SPEEDFAM CO., LTD.	发明人	IKEMOTO KIYOSHI
分类号	B08B1/04;B08B3/08;B08B11/02;B08B13/00;G11B5/84;G11B7/26;G11B23/50;H01L21/00;(IPC1-7):G11B5/84;G11B7/00	主分类号	B08B1/04
代理机构		代理人
主权项
地址

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