| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave device capable of coping with a high frequency. SOLUTION: The device is provided with a single crystal or polycrystal substrate, a piezoelectric thin film formed on the single crystal or polycrystal substrate, and interdigital electrodes made of a conductive film formed on the piezoelectric thin film. In this case, a single crystal or polycrystal diamond substrate is adopted for the single crystal or polycrystal substrate, and a lead zirconate titanate (PZT) or lead titanate (PT) made by the sol-gel method is adopted for the piezoelectric thin film. Or as required, a lead zirconate titanate (PZT) or lead titanate (PT) thin film whose thickens is 0.3-5μm made by the sol-gel method is adopted for the piezoelectric thin film. |
