| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress the occurrence of the reflected wave in a discharge container and enable the high density and uniform plasma to be generated efficiently. SOLUTION: At the end section of a discharge tube 10 having a cavity section 10A, a wave guide tube 2 giving a micro wave and a micro wave cavity wall 5 and the like are provided, in a emission device connecting a surface wave by a micro wave from a surface wave connecting section 7 to the discharge tube 10, a lead wire 12 is arranged along the longitudinal direction of the discharge tube 10 in the said discharge cavity section 10A, a magnetic field perpendicular to the electrical field of the surface wave is given by feeding the prescribed current to this lead wire 12 from the direct power source. Since the electron in a plasma P causes the cyclotron resonance and absorbs the surface wave energy, a reflected wave of the surface wave is reduced and the plasma with high density and uniformity is generated.</p> |
