| 摘要 |
PROBLEM TO BE SOLVED: To form a distortion sensor without a polarization process, by forming a piezoelectric crystal film on a face of titanium metal on a substrate by a hydrothermal synthesis method and applying an electrode on the piezoelectric crystal film. SOLUTION: A Ti substrate 1 is set and fixed in a mixed solution of Pb(NO3 )2 aqueous solution, ZrOCl2 aqueous solution, TiCl4 aqueous solution and KOH aqueous solution. A surface treatment is carried out under a hydrothermal condition of a predetermined temperature and a predetermined time. In order to grow the obtained Pb(Zrx Ti1-x )O3 crystal, the Ti substrate 1 is set and fixed in the mixed solution of Pb(NO3 )2 aqueous solution, ZrOCl2 aqueous solution, TiCl4 aqueous solution and KOH aqueous solution, and a hydrothermal process is conducted at a predetermined temperature for a predetermined time, whereby a Pb(Zrx Ti1-x )O3 film formed. The film is cleaned with ultrasonic waves in deionized water, cleaned with ultrasonic waves in acetic acid aqueous solution, and further cleaned with ultrasonic waves in deionized water. The film is then dried, whereby a piezoelectric crystal film 2 of a thickness of 1-30μm is obtained. A gold electrode 3 is formed on the piezoelectric crystal film 2 by vapor deposition.
|
