发明名称 MULTI-CHIP MOUNTING METHOD
摘要 PROBLEM TO BE SOLVED: To effectively mount chips, even when the chip heights differ, by inserting adhesive between an electrode forming face of a substrate and chip electrode face, aligning the substrate electrodes with opposed chip electrodes and hot pressing them through a buffer layer over the backs of the chips. SOLUTION: With adhesives inserted between an electrode 5 forming face of a substrate 1 and electrodes 4 of chips 2, the substrate electrodes 5 are aligned with the electrodes 4 of the opposed chips 2 and hot pressed with a buffer layer 6 over the backs of the chips 2 in a conduction test step and hot pressing step. The electrodes 5 of the substrate 1 and electrodes 4 of the chips 2 are aligned, using an image recognizer, etc., the substrate 1 and chips 2 are temporarily fixed by adhesive 3, and the buffer layer 6 is inserted between the backs of the chips 2 and the press die 8 to heat and press. This can mount the chips 2 effectively, even when the chip heights differ.
申请公布号 JPH10256311(A) 申请公布日期 1998.09.25
申请号 JP19970062884 申请日期 1997.03.17
申请人 HITACHI CHEM CO LTD 发明人 TSUKAGOSHI ISAO;KOBAYASHI KOJI;MATSUDA KAZUYA;FUKUSHIMA NAOKI
分类号 H01L21/60;H01L25/04;H01L25/18;(IPC1-7):H01L21/60 主分类号 H01L21/60
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