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经营范围
发明名称
Detektoranordnung
摘要
申请公布号
DE69317686(T2)
申请公布日期
1998.09.24
申请号
DE19936017686T
申请日期
1993.01.28
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
YOSHII, MINORU, C/O CANON KABUSHIKI KAISHA, TOKYO 146, JP;NOSE, HIROYASU, C/O CANON KABUSHIKI KAISH, TOKYO 146, JP;TAKEUCHI, SEIJI, C/O CANON KABUSHIKI KAISHA, TOKYO 146, JP
分类号
G01B11/00;G01D5/38;H01L21/027;H01L21/30;(IPC1-7):G01D5/38
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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