发明名称
摘要 Light-sensitive compositions composed of a polymer and a photoactive component meet the requirements relating to photoresists to a high degree if the polymer contains carboxylic anhydride groups or phenolic hydroxyl groups and the photoactive component is an N-alkylated or N-arylated 1,4-dihydropyridine or 1,4-dihydropyridine derivative of the following structure: <IMAGE> where the radical R is a (substituted) aryl radical which has an NO2 group in the ortho-position with respect to the bond to the dihydropyridine ring and R3 is alkyl, cyclohexyl or phenyl.
申请公布号 JP2800148(B2) 申请公布日期 1998.09.21
申请号 JP19900071782 申请日期 1990.03.19
申请人 发明人
分类号 G03F7/038;C08K5/3432;C08L101/00;G03F7/004;G03F7/26;H01L21/027;H01L21/30;(IPC1-7):G03F7/004;C08K5/343 主分类号 G03F7/038
代理机构 代理人
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