| 摘要 |
PURPOSE:To obtain the title composition having a high gamma value by specifying a pattern area of diester of quinone diazide sulfonate of a specified phenol compd. to >=50% of the total pattern area. CONSTITUTION:The diester of quinone diazide sulfonate of eight or more valent polyhydric phenol compd. is incorporated abundantly in the radiation sensitive component of the composition. Namely, in the pattern of a high speed liquid chromatography measured by a detector using an UV ray having a wavelength of 254nm of the quinone diazide sulfonate, the pattern area of the diester of quinone diazide sulfonate of the eight or more valent phenol compd. is specified to >=50% of the total pattern area. Thus, the positive type resist composition having the high gamma valve is obtd. |
